Low power, high extinction electrothermal MEMS iris VOA

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Veladi, H ^a   Syms, R R A ^a   Zou, H ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POWER UTILIZATION; OPTICAL DEVICES; RESONANCE;

ELECTROTHERMAL ACTUATION; ELECTROTHERMAL DESIGN; MECHANICAL RESONANCE; VARIABLE OPTICAL ATTENUATOR (VOA);

MICROELECTROMECHANICAL DEVICES;

EID: 33746748836     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662093     Document Type: Conference Paper

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