A monolithically integrated HgCdTe short-wavelength infrared photodetector and micro-electro-mechanical systems-based optical filter

Journal of Electronic Materials

Volumn 34, Issue 6, 2005, Pages 716-721

  Antoszewski, J ^a   Winchester, K J ^a   Keating, A J ^a   Nguyen, T ^a   Silva, K K M B D ^a   Musca, C A ^c   Dell, J M ^a   Faraone, L ^a   Mitra, P ^b   Beck, J D ^b   Skokan, M R ^b   Robinson, J E ^b  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

^b DRS Sensors and Targeting Systems Inc   (United States)

^c NONE

Author keywords

HgCdTe; MEMS filter; SWIR photodetector

Indexed keywords

APPROXIMATION THEORY; CALIBRATION; MICROELECTROMECHANICAL DEVICES; OPTICAL FILTERS; PHOTOCONDUCTING MATERIALS; PHOTODETECTORS;

HGCDTE; MEMS FILTER; OPTICAL CAVITY; SHORT-WAVELENGTH IR (SWIR) PHOTODETECTORS;

MERCURY COMPOUNDS;

EID: 21644485914     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0009-5     Document Type: Conference Paper

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