Origin of cracking in nanoscale Cu/Ta multilayers

Applied Physics Letters

Volumn 89, Issue 4, 2006, Pages

  Zhang, G P ^a   Zhu, X F ^a   Tan, J ^a   Liu, Y ^b  

^a INSTITUTE OF METAL RESEARCH   (China)

^b NANOMETRICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION REGIONS; GRAIN ROTATION; LOCAL GRAIN BOUNDARY SLIDING; NANOSCALE CU/TA MULTILAYERS;

COPPER; CRACK INITIATION; DEFORMATION; GRAIN BOUNDARIES; NANOSTRUCTURED MATERIALS; POLYIMIDES; TANTALUM;

MULTILAYERS;

EID: 33746622981     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2244015     Document Type: Article

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