Nano-roughness assessment by light scattering measurement;Bewertung von nanorauheiten durch streulichtmessung

Technisches Messen

Volumn 73, Issue 1, 2006, Pages 35-42

  Schröder, Sven ^a,b   Duparré, Angela ^b   Tünnermann, Andreas ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

Functional surfaces; Light scattering; Metrology; Nanostructure; Roughness

Indexed keywords

FUNCTIONAL PARAMETERS; FUNCTIONAL SURFACES; LIGHT SCATTERING MEASUREMENT; LIGHT SCATTERING TECHNIQUES; MEASUREMENT TECHNIQUES; NANOROUGHNESS;

INSTRUMENTS; MEASUREMENTS; NANOSTRUCTURES; SURFACE ROUGHNESS;

LIGHT SCATTERING;

EID: 33746067147     PISSN: 01718096     EISSN: 01718096     Source Type: Journal    
DOI: 10.1524/teme.2006.73.1.35     Document Type: Article

References (10)

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2. J. C. Stover: Optical Scattering Measurement and Analysis. 2. Aufl., SPIE, Bellingham, Wash. 1995.
3. J. M. Bennett, L. Mattson: Introduction to Surface Roughness and Scattering. Opt. Soc. of Am., Wash. DC 1989.
4. A. Duparré, J. Ferré-Borrull, S. Gliech, G. Notni, J. Steinert und J. M. Bennett: Surface characterization techniques for determining rms roughness and power spectral densities of optical components. - In: Appl. Opt. 41(2002), S. 154-171.
5. S. Gliech, S. Schröder und A. Duparré: High-sensitivity light scattering measurement of optical coating components. OSA Topical Meeting on Optical Interference Coatings, 27 June - 2 July 2004, Tucson, Arizona
6. (In: OIC '04 Technical Digest, CD-ROM, WE2).
7. S. Schröder, S. Gliech und A. Duparré: Measurement system to determine the total and angle resolved light scattering of optical components in the deepultraviolet and vacuum-ultraviolet spectral regions. In: Appl. Opt. 44 (2005), S. 6093-6107.
8. ISO 13696:2002, Optics and optical instruments - Test methods for radiation scattered by optical components. International Organization for Standardization, (2002).
9. A. Duparré: Scattering from Surfaces and Thin Films. - In: Encyclopedia of Modern Optics. R.D. Guenther et al., Elsevier, Oxford (2004), S. 314-321.
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