Combinatorial-mold imprint lithography: A versatile technique for fabrication of three-dimensional polymer structures

Applied Physics Letters

Volumn 89, Issue 2, 2006, Pages

  Low, Hong Yee ^a   Zhao, Wei ^a   Dumond, Jarrett ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LARGE SCALE SYSTEMS; LITHOGRAPHY; STRUCTURAL ANALYSIS; THERMOPLASTICS;

CROSS-LINKED POLYMER MATERIALS; NANOIMPRINT LITHOGRAPHY; THREE-DIMENSIONAL STRUCTURES; TWO-DIMENSIONAL GEOMETRIES;

NANOSTRUCTURED MATERIALS;

EID: 33746049414     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2219148     Document Type: Article

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