A novel lightweight piezo-composite actuator micropump

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6172, Issue , 2006, Pages

  Nguyen, Thanh Tung ^a   Goo, Nam Seo ^a   Yoon, Young Soo ^a   Yoon, Kwang Joon ^a  

^a Konkuk University   (South Korea)

Author keywords

LIPCA; Piezoelectric actuator; Polydimethylsiloxane (PDMS); Valveless micropump

Indexed keywords

DIAPHRAGMS; ELECTROMAGNETIC PUMPS; EPOXY RESINS; NUMERICAL METHODS; PIEZOELECTRIC DEVICES; POLYSILICON;

LIGHTWEIGHT PIEZOELECTRIC COMPOSITE ACTUATOR (LIPCA); PIEZOELECTRIC ACTUATORS; POLYDIMETHYLSILOXANE (PDMS); VALVELESS MICROPUMPS;

MICROACTUATORS;

EID: 33745943253     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657523     Document Type: Conference Paper

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