Titanium nitride electrodes for micro-gap discharge

Microelectronics Journal

Volumn 37, Issue 9, 2006, Pages 867-870

  Hsieh, Chung Fon ^a   Jou, Shyankay ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Breakdown voltage; ESD discharge; Micro gap discharge; Titanium nitride

Indexed keywords

ELECTRIC BREAKDOWN; ELECTRIC POTENTIAL; ELECTRODES; FABRICATION; THIN FILMS;

ESD DISCHARGE; MICRO-GAP DISCHARGE; NITROGEN PLASMA;

TITANIUM NITRIDE;

EID: 33745910871     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.03.003     Document Type: Article

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