X-ray diffraction analysis of the anisotropic nature of the structural imperfections in a sputter-deposited TiO2/Ti3Al bilayer

Thin Solid Films

Volumn 514, Issue 1-2, 2006, Pages 110-119

  Zhao, Y H ^a   Welzel, U ^a   van Lier, J ^a   Mittemeijer, E J ^a  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Crystallite size; Debye Waller parameter; Microstrain; Microstructure; Sputtering; Stress; TiO2 Ti3Al bilayer; X ray diffraction

Indexed keywords

ANISOTROPY; CRYSTAL LATTICES; CRYSTAL ORIENTATION; DEFECTS; ENERGY DISPERSIVE SPECTROSCOPY; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; RESIDUAL STRESSES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CRYSTALLITE SIZE; DEBYE-WALLER PARAMETER; MICROSTRAIN; TIO2/TI3AL BILAYER;

TITANIUM OXIDES;

EID: 33745899057     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.02.076     Document Type: Article

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