AFM study of forces between silica, silicon nitride and polyurethane pads

Journal of Colloid and Interface Science

Volumn 300, Issue 2, 2006, Pages 475-481

  Sokolov, Igor ^a   Ong, Quy K ^a   Shodiev, Hasan ^a   Chechik, Nina ^b   James, David ^b   Oliver, Mike ^b  

^a CLARKSON UNIVERSITY   (United States)

^b ROHM AND HAAS COMPANY   (United States)

Author keywords

AFM; Chemical mechanical planarization; DLVO; Silica; Silicon nitride; Surface forces; Surface potential

Indexed keywords

ACIDITY; ATOMIC FORCE MICROSCOPY; POLYURETHANES; SILICA; SILICON NITRIDE; SOLUTIONS;

CHEMICAL MECHANICAL PLANARIZATION; SURFACE FORCES; SURFACE POTENTIAL; ZETA POTENTIALS;

SURFACE PROPERTIES;

POLYURETHAN; SILICON DIOXIDE; SILICON NITRIDE;

ACIDITY; ADHESION; AQUEOUS SOLUTION; ARTICLE; ATOMIC FORCE MICROSCOPY; MEASUREMENT; METHODOLOGY; OXIDATION; PARAMETER; PRIORITY JOURNAL; ZETA POTENTIAL;

EID: 33745859713     PISSN: 00219797     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcis.2006.04.023     Document Type: Article

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