Fabrication of suspended thin film resonator for application of RF bandpass filter

Microelectronics Reliability

Volumn 44, Issue 2, 2004, Pages 237-243

  Kim, Hyun Ho ^a   Ju, Byeong Kwon ^b   Lee, Yun Hi ^b   Lee, Si Hyung ^b   Lee, Jeon Kook ^b   Kim, Soo Won ^a  

^a Korea University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BANDPASS FILTERS; BANDWIDTH; ELECTRIC IMPEDANCE; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY; QUALITY CONTROL; RESONANCE; RESONATORS; SUBSTRATES;

SIGNAL TRANSMISSIONS; SUSPENDED THIN FILM RESONATORS (STFR);

THIN FILMS;

EID: 0942288141     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2003.09.007     Document Type: Article

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