Fast deposition of lead-zirconate-titanate thick films by arc discharged reactive ion-plating method

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 11 B, 2002, Pages 6976-6979

  Akamatsu, Masahiro ^a   Tani, Masanao ^a   Yasuda, Yoshiaki ^a  

^a STANLEY ELECTRIC CO LTD   (Japan)

Author keywords

Arc discharge; Diaphragm actuator; Ferroelectric properties; Ion plating; Lead zirconate titanate; Piezoelectric constant

Indexed keywords

FERROELECTRICITY; IONS; PEROVSKITE; PIEZOELECTRIC DEVICES; PLATING; THICK FILMS;

ARC DISCHARGE; DIAPHRAGM ACTUATORS; FERROELECTRIC PROPERTIES; ION PLATING; LEAD-ZIRCONATE-TITANATE (PZT); PIEZOELECTRIC CONSTANT;

LEAD COMPOUNDS;

EID: 8644275403     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.6976     Document Type: Article

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