Development of a low temperature plasma source providing ion flow energy control

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 495-500

  Takahashi, K ^a   Kaneko, T ^a   Hatakeyama, R ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRON EMISSION; ELECTROSTATICS; LOW TEMPERATURE EFFECTS; POWER CONTROL;

ELECTROSTATIC ION ENERGY; ION FLOW; LANGMUIR PROBES; MAGNETIC-FIELD LINES; SPACE POTENTIAL;

PLASMA SOURCES;

EID: 33745630135     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/027     Document Type: Article

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