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Volumn 44, Issue 4 A, 2005, Pages 1611-1614
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Nitrogen doping of single-walled carbon nanotube by using mass-separated low-energy ion beams
a,c b,c a,b,c |
Author keywords
Carbon nanotube; CNT FET; Doping; Ion implantation; Low energy ion beam; SWCNT
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Indexed keywords
DOPING (ADDITIVES);
ELECTRON ENERGY LOSS SPECTROSCOPY;
FIELD EFFECT TRANSISTORS;
FULLERENES;
ION BEAMS;
ION IMPLANTATION;
MAGNETIC LENSES;
NITROGEN;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAHIGH VACUUM;
GAS PHASE REACTIONS;
LOW-ENERGY ION BEAMS;
MASS ANALYZERS;
SINGLE-WALLED CARBON NANOTUBES (SWCNT);
CARBON NANOTUBES;
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EID: 21244466363
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.44.1611 Document Type: Article |
Times cited : (31)
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References (18)
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