Visible light point-diffraction interferometer for testing of EUVL optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 I, Issue , 2006, Pages

  Takeuchi, Seiji ^a   Kakuchi, Osamu ^a   Yamazoe, Kenji ^a   Gomei, Yoshio ^a   Decker, Todd A ^b   Johnson, Michael A ^b   Phillion, Donald W ^b   Taylor, John S ^b  

^a CANON INC   (Japan)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

EUV; Interferometer; Lithography; PDI; Wavefront

Indexed keywords

CALIBRATION; ERROR ANALYSIS; INTERFEROMETERS; LITHOGRAPHY; REFRACTIVE INDEX; WAVEFRONTS;

ERROR SOURCES; EUV; PDI; REFRACTIVE TEST OPTIC;

DIFFRACTIVE OPTICS;

EID: 33745621559     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656275     Document Type: Conference Paper

References (5)

1. Gary E. Sommargren, Donald. W. Phillion, Michael A. Johnson, Nhan Q. Nguyen, Anton Barty, Franklyn J. Snell, Daren R. Dillon, Lloyd S. Bradsher, "100-picometer interferometry for EUVL," Proc. SPIE 4688 (2002) 316.
2. Kenneth A. Goldberg, Edita Tejnil, Sang Hun Lee, Hector Medecki, David T. Attwood, Jr., Keith H. Jackson, Jeffrey Bokor, "Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry," Proc. SPIE 3048 (1997) 264.
3. Katsuhiko Murakami, Jun Saito, Kazuya Ota, Hiroyuki Kondo, Mikihiko Ishii, Jun Kawakami, Tetsuya Oshino, Katsumi Sugisaki, Yucong Zhu, Masanobu Hasegawa, Yoshiyuki Sekine, Seiji Takeuchi, Chidane Ouchi, Osamu Kakuchi, Yutaka Watanabe, Takayuki Hasegawa, Shinichi Hara, Akiyoshi Suzuki, "Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes," Proc. SPIE 5037 (2003) 257.
4. Michael A. Johnson, Donald W. Phillion, Gary E. Sommargren, Todd A. Decker, John S. Taylor, Yoshio Gomei, Osamu Kakuchi, Seiji Takeuchi, "Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems," Proc. SPIE 5869 (2005) 156.
5. Donald W. Phillion, Gary E. Sommargren, Michael A. Johnson, Todd A. Decker, John S. Taylor, Yoshio Gomei, Osamu Kakuchi, Seiji Takeuchi, "Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems," Proc. SPIE 5869 (2005) 177.