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Volumn 5037 I, Issue , 2003, Pages 257-264

Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Author keywords

EUV interferometer; PDI; Shearing interferometer; Undulator; Wavefront metrology

Indexed keywords

LITHOGRAPHY; MEASUREMENTS; MIRRORS; PROJECTION SYSTEMS;

EID: 0141836119     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484935     Document Type: Conference Paper
Times cited : (22)

References (5)
  • 2
    • 0036380126 scopus 로고    scopus 로고
    • Honing the accuracy of extreme ultraviolet optical system testing: At-wavelength and visible-light measurements of the ETS set-2 projection optic
    • K. A. Goldberg, P. Naulleau, J. Bokor and H. N. Chapman, "Honing the accuracy of extreme ultraviolet optical system testing: at-wavelength and visible-light measurements of the ETS Set-2 projection optic", Proc. SPIE 4688, 329-337 (2002).
    • (2002) Proc. SPIE , vol.4688 , pp. 329-337
    • Goldberg, K.A.1    Naulleau, P.2    Bokor, J.3    Chapman, H.N.4
  • 5
    • 0034763355 scopus 로고    scopus 로고
    • Advanced point diffraction interferometer for EUV aspherical mirrors
    • K. Ota, T. Yamamoto, Y. Fukuda, K. Otaki, I. Nishiyama and S. Okazaki, "Advanced point diffraction interferometer for EUV aspherical mirrors", Proc. SPIE 4343, 543-558 (2001).
    • (2001) Proc. SPIE , vol.4343 , pp. 543-558
    • Ota, K.1    Yamamoto, T.2    Fukuda, Y.3    Otaki, K.4    Nishiyama, I.5    Okazaki, S.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.