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Volumn 5037 I, Issue , 2003, Pages 257-264
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Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes
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Author keywords
EUV interferometer; PDI; Shearing interferometer; Undulator; Wavefront metrology
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Indexed keywords
LITHOGRAPHY;
MEASUREMENTS;
MIRRORS;
PROJECTION SYSTEMS;
EXTREME ULTRAVIOLET INTERFEROMETER;
EXTREME ULTRAVIOLET WAVEFRONT METROLOGY METHODS;
LATERAL SHEARING INTERFEROMETER;
LINE DIFFRACTION INTERFEROMETER;
POINT DIFFRACTION INTERFEROMETER;
UNDULATOR LIGHT SOURCE;
INTERFEROMETERS;
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EID: 0141836119
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.484935 Document Type: Conference Paper |
Times cited : (22)
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References (5)
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