Calibration of symmetric and non-symmetric errors for interferometry of ultra-precise imaging systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5869, Issue , 2005, Pages 1-12

  Phillion, Donald W ^a   Sommargren, Gary E ^a   Johnson, Michael A ^a   Decker, Todd A ^a   Taylor, John S ^a   Gomei, Yoshio ^b   Kakuchi, Osamu ^b   Takeuchi, Seiji ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b CANON INC   (Japan)

Author keywords

Interferometer; Phase shifting interferometry; Wavefront measurement

Indexed keywords

ALGORITHMS; FIBER OPTICS; INTERFEROMETERS; INTERFEROMETRY;

PHASE-SHIFTING INTERFEROMETRY; WAVEFRONT MEASUREMENT;

IMAGING SYSTEMS;

EID: 29144516295     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.623187     Document Type: Conference Paper

References (7)

1. G. E. Sommargren, et. al., 100-picometer interferometry for EUVL, in Proc. SPIE, (4688) 316 (2002)
2. D. A. Tichenor, et. al., System Integration and Performance of the EUVL Engineering Test Stand, Emerging Lithographic Technologies V, Proc. SPIE (4243) 19 (2001)
3. M. J. Johnson, et. al., Construction and testing of wavefront reference sources for interferometry of ultra-precise imaging systems, in Proc. SPIE, August meeting, 2005.
4. Optical Research Associates, Code V Reference Manual Version 9.5 Volume II, pp 10-21 to 10-22.
5. th (expanded) edition, Cambridge University Press (1999), Appendix VII.
6. Daniel Malacara, Optics Shop Testing, John Wiley & Sons, Inc. (New York, 1992), sections 13.2.2 and 13.2.3 .
7. D. W. Phillion, General methods for generating phase-shifting interferometry algorithms, Appl. Opt. 36 (31) 8098 (1997).