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Volumn 6151 II, Issue , 2006, Pages

New contamination experimental equipment in the NewSUBARU and evaluation of Si-capped multilayer mirrors using it

Author keywords

Contamination; EUVL; Lifetime; Mirror; Mo Si; Multilayer

Indexed keywords

CONTAMINATION; LITHOGRAPHY; MULTILAYERS; SYNCHROTRON RADIATION; TEST FACILITIES; ULTRAVIOLET RADIATION;

EUVL; LIFETIME; LONG UNDULATOR (LU); MO/SI;

MIRRORS;

EID: 33745601929 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.656845 Document Type: Conference Paper

Times cited : (5)

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