Recent progress in 193 nm antireflective coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue II, 1999, Pages 800-809

  Meador, Jim D ^a   Guerrero, Douglas J ^a   Xu, Gu ^a   Shao, Xie ^a   Dobson, Norman ^a   Claypool, James ^a   Nowak, Kelly ^a  

^a BREWER SCIENCE INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER; PHOTORESISTS;

BOTTOM ANTIREFLECTIVE COATINGS (BARC);

ANTIREFLECTION COATINGS;

EID: 0032624067     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350269     Document Type: Conference Paper

References (11)