Modeling methodologies and defect printability maps for buried defects in EUV mask blanks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 I, Issue , 2006, Pages

  Lam, Michael C ^a   Neureuther, Andrew R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Buried defects; Defect inspection; Defective multilayers; EUV; Fast simulation methods; FDTD; Mask blanks; Numerical dispersion; Ray tracing

Indexed keywords

BURIED DEFECTS; DEFECT INSPECTION; DEFECTIVE MULTILAYERS; EUV; FAST SIMULATION METHODS; FDTD; MASK BLANKS; NUMERICAL DISPERSION;

CRYSTAL STRUCTURE; FIBER BRAGG GRATINGS; FINITE DIFFERENCE METHOD; LIGHTING; MULTILAYERS; RAY TRACING; REFLECTION; TIME DOMAIN ANALYSIS;

CRYSTAL DEFECTS;

EID: 33745591093     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656744     Document Type: Conference Paper

References (8)

1. Lam, M.C. and A.R. Neureuther, "A 3-D substrate and buried defect simulator for EUV mask blanks." Proc. of the SPIE, vol. 5751, 2005.
2. Stearns, D.G., et.al, "Localized defects in multilayer coatings." Thin Solid Films, 2004. 446(1): p. 37-49.
3. T. Pistor, "Electromagnetic Simulation and Modeling with Applications in Lithography." Ph.D. Dissertation, University of California at Berkeley, 2001.
4. Gullikson, E.M., et al., "Practical approach for modeling extreme ultraviolet lithography mask defects." Journal of Vacuum Science & Technology B, 2002.20(1): p. 81-6.
5. A. Taflove, Computational Electrodynamics: The Finite-Difference Time -Domain Method (Artech House, Norwood, MA, 1995).
6. A. Wong, "Rigorous Three-Dimensional Time-Domain Finite-Difference Electromagnetic Simulation," Ph.D. Dissertation, University of California at Berkeley, 1994.
7. Pistor, T.V. "Accuracy issues in the finite difference time domain simulation of photomask scattering." Proceedings of SPIE, vol. 4346, 2001.
8. Watanabe, H., et al. "Detection and printability of shifter defects in phase-shifting masks. II. Defocus characteristics." Japanese Journal of Applied Physics Part 1, vol.31, no.12B, Dec. 1992, pp.4155-60.