Effect of residual gas atmosphere on lifetime of Ru-capped EUVL projection optics mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 I, Issue , 2006, Pages

  Kakutani, Yukinobu ^a   Niibe, Masahito ^a   Gomei, Yoshio ^b   Takase, Hiromitsu ^b   Terashima, Shigeru ^b   Matsunari, Shuichi ^b   Aoki, Takashi ^b   Murakami, Katsuhiko ^b   Fukuda, Yasuaki ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b Extreme Ultra Violet Lithography System Development Association   (Japan)

Author keywords

Contamination; EUVL; Multilayer mirror; Radiation damage; Reflectance

Indexed keywords

HYDROCARBONS; IMPURITIES; IRRADIATION; REFLECTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EUV IRRADIATION; PROJECTION OPTICS MIRROR; RESIDUAL GAS ATMOSPHERE; SURFACE ANALYSIS;

MIRRORS;

EID: 33745591092     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656240     Document Type: Conference Paper

References (6)

1. B. Mertens, B. Wolschrijn, R. Jansen, N. Koster, M. Weiss, M. Wedowski, R. Klein, T. Bock, and R. Thornagel, "EUV time-resolved studies on carbon growth and cleaning", Proc. SPIE 5037 (2003) 95.
2. S. Bajt, H. N. Chapman, N. Nguyen, J. Alameda, J. C. Robinson, M. Malinowski, E. Gullikson, A. Aquila, C. Tarrio, and S. Grantham, "Design and performance of capping layers for EUV multilayer mirrors", Proc. SPIE 5037 (2003) 236.
3. S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and G. Edwards, "Oxidation resistance of Ru-capped EUV multilayers", Proc. SPIE 5751 (2005) 118.
4. Y. Gomei, Y. Kakutani, H. Takase, M. Niibe, S. Terashima, T. Aoki, and S. Matsunari, "The role of ambient hydrocarbon species to reduce oxidation in Ru capping layer for EUVL optics mirror", Microelect. Eng., in press.
5. Y. Kakutani, M. Niibe, K. Kakiuchi, H. Takase, S. Terashima, H. Kondo, S. Matsunari, T. Aoki, Y. Gomei, and Y. Fukuda, "A reflectance measurement system for investigating radiation damage to EUVL mirrors in NewSUBARU", Proc. SPIE 5533 (2005) 47.
6. M. Niibe, Y. Kakutani, S. Terashima, H. Takase, Y. Gomei, S. Matsunari, T. Aoki, K. Murakami, and Y. Fukuda, "A new contamination experimental equipment in the NewSUBARU and evaluation of Sicapped multilayer mirrors using it", Proc. SPIE 5751 (2006), to be published.