High-resistance W-plug monitoring with an advance e-beam inspection system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 II, Issue , 2006, Pages

  Liu, Hermes ^a   Yeh, J H ^a   Yang, Chan Lon ^a   Lei, S C ^a   Kao, J Y ^a   Yang, Y D ^a   Tsai, Mingsheng ^a   Tzou, S F ^a   Wu, Hvei Yih ^b   Wu, Hong Chi ^b   Xiao, Hong ^c   Jau, Jack ^c  

^a UNITED MICROELECTRONICS CORPORATION   (Taiwan)

^b Hermes Systems   (Taiwan)

^c Hermes Microvision Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONNECTORS; ELECTRIC POTENTIAL; ELECTRON BEAMS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

DARK VOLTAGE CONTRAST (DVC) DEFECTS; E-BEAM INSPECTION; WAFER ACCEPTANCE TEST (WAT);

DEFECTS;

EID: 33745586542     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656217     Document Type: Conference Paper

References (5)

1. Characterization Analysis Study of μ-bridge Defect Using Simulation and Wafer Inspection Tools, Tae-yong Lee, Byoung-ho Lee*, Soo-bok Chin, Do-hyun Cho, and Chang-lyong Song, Semicondutor R&D Center, Memory Business Division, Samsung Electronics. Co., Ltd, Korea Jorge P. Fernandez, Domingo Choi, Luca Grella KLA-Tencor Corporation, SPIE Microlithography 2005 5752_164
2. Electrical Defect SEM Review under the Various Electrical Circumstance on SAC layer. Jong II Choi, Seo Shik Hur, Ki Hwa Ko, Jeong-Ho Yeo* Applied Materials, Korea (PDC), Applied Materials, Israel*
3. Characterization of Copper Voids in Damascene Processes Richard L. Guldi, Member, IEEE, Judy B. Shaw, Jeffrey Ritchison, Daniel L. Corum, Steven Oestreich, Kara Sherman, Jason H. Lin, and Robert Fiordalice, Member, IEEE, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 17, NO. 4, NOVEMBER 2004
4. X. Liu, X, Zhang, Y. Zhao, A. Desai, and Z. W. Chen, "Low energy large scan field electron beam column for wafer inspection", J. Vac. Sci. Tech. B, 22, pp.3534-3538, 2004
5. Hermes Liu, J. H. Yeh, Mingsheng Tsai, Scott Lin, Kirin Wang, Shuen Chen Lei, Wei-Yih Wu, Hong-Chi Wu, Hong Xiao, Jack Jau, "In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced e-beam System", Proceedings of ISSM, pp. 448, 2005.