Low energy large scan field electron beam column for wafer inspection

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3534-3538

  Liu, X ^a   Zhang, X ^a   Zhao, Y ^a   Desai, A ^a   Chen, Z W ^a  

^a Hermes Microvision Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMATIC ABERRATIONS; SEMICONDUCTOR DETECTORS; SWING OBJECTIVE RETARDING IMMERSION LENS (SORIL); WAFER INSPECTION;

ABERRATIONS; ELECTRIC POTENTIAL; ELECTROSTATIC LENSES; FOCUSING; MAGNETIC LENSES; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES;

ELECTRON BEAMS;

EID: 13244251409     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1827629     Document Type: Conference Paper

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