Wafer bonding involving complex oxides

Materials Research Society Symposium - Proceedings

Volumn 574, Issue , 1999, Pages 285-292

  Alexe, M ^a   Kopperschmidt, P ^a   Gosele U ^a   Tong, Qin Yi ^b   Huang, Li Juan ^b  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^b Duke University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; FERROELECTRIC MATERIALS; OXIDES; PERMITTIVITY; SEMICONDUCTOR MATERIALS; SILICON WAFERS; SINGLE CRYSTALS;

DIRECT WAFER BONDING (DWB); SINGLE CRYSTAL OXIDE FILMS;

HETEROJUNCTIONS;

EID: 0033279552     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-574-285     Document Type: Article

References (6)

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