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Volumn 748, Issue , 2003, Pages 337-342
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Ferroelectric oxide single-crystalline layers by wafer bonding and hydrogen/helium implantation
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CERAMIC MATERIALS;
HELIUM;
HYDROGEN;
SINGLE CRYSTALS;
WAFER BONDING;
FERROELECTRIC MATERIALS;
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EID: 0038037092
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (5)
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