Fabrication of double sided yba2cu3o7 thin films on 2 inch diameter laalo3 wafers by direct wafer bonding

IEEE Transactions on Applied Superconductivity

Volumn 7, Issue 2 PART 2, 1997, Pages 1244-1248

  Eom, C B ^a   Huang, L ^a   Rao, R A ^a   Tong, Q Y ^a,b   Gosele U ^a  

^a Duke University   (United States)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; FILM PREPARATION; HIGH TEMPERATURE SUPERCONDUCTORS; OXIDE SUPERCONDUCTORS; POLISHING; SPUTTER DEPOSITION; SUBSTRATES;

DIRECT WAFER BONDING;

SUPERCONDUCTING FILMS;

EID: 0031162310     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/77.620739     Document Type: Article

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