메뉴 건너뛰기




Volumn 25, Issue 2, 2006, Pages 161-165

Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

Author keywords

Hexagonal wurtzite structure; PLD; Semiconductor materials; ZnO thin film

Indexed keywords

EFFECTS; INFRARED SPECTROPHOTOMETERS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SUBSTRATES; THIN FILMS;

EID: 33745543967     PISSN: 10010521     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1001-0521(06)60033-8     Document Type: Article
Times cited : (8)

References (17)
  • 2
    • 0031074701 scopus 로고    scopus 로고
    • Characterization and optimization of zinc oxide films by r.f. magnetron sputtering
    • Sundaram K.B. and Khan A., Characterization and optimization of zinc oxide films by r.f. magnetron sputtering, Thin Solid Films, 1997, 295: 87.
    • (1997) Thin Solid Films , vol.295 , pp. 87
    • Sundaram, K.B.1    Khan, A.2
  • 3
    • 36749104932 scopus 로고
    • Metalorganic chemical vapor deposition of oriented. ZnO films over large areas
    • Smith F.T.J., Metalorganic chemical vapor deposition of oriented. ZnO films over large areas, Appl. Phys. Lett., 1983, 43: 1108.
    • (1983) Appl. Phys. Lett. , vol.43 , pp. 1108
    • Smith, F.T.J.1
  • 7
    • 0034840350 scopus 로고    scopus 로고
    • 4 thin films grown by pulsed laser deposition: Effects of temperature and pressure on the grain morphology and microstructure
    • 4 thin films grown by pulsed laser deposition: effects of temperature and pressure on the grain morphology and microstructure, Chem. Mater., 2001, 13(5): 1545.
    • (2001) Chem. Mater. , vol.13 , Issue.5 , pp. 1545
    • Korzenski, M.B.1    Lecoeur, Ph.2    Mercey, B.3    Raveau, B.4
  • 8
    • 15344339209 scopus 로고    scopus 로고
    • Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD)
    • Zhao J.L., Li X.M., Bian J.M., Yu W.D., and Gao X.D., Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD), J. Cryst. Growth, 2005, 276: 507.
    • (2005) J. Cryst. Growth , vol.276 , pp. 507
    • Zhao, J.L.1    Li, X.M.2    Bian, J.M.3    Yu, W.D.4    Gao, X.D.5
  • 9
    • 0036301267 scopus 로고    scopus 로고
    • Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition
    • Myoung J.M., Yoon W.H., Lee D.H., Yun I., Bae S.H., and Lee S.Y., Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition, Jpn. J. Appl. Phys., 2002, 41: 28.
    • (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 28
    • Myoung, J.M.1    Yoon, W.H.2    Lee, D.H.3    Yun, I.4    Bae, S.H.5    Lee, S.Y.6
  • 11
    • 0030562945 scopus 로고    scopus 로고
    • Pulsed-laser deposited ZnO for device applications
    • King S., Gardeniers J.G.E., and Boyd I.W., Pulsed-laser deposited ZnO for device applications, Appl. Surf. Sci., 1996, 96-98: 811.
    • (1996) Appl. Surf. Sci. , vol.96-98 , pp. 811
    • King, S.1    Gardeniers, J.G.E.2    Boyd, I.W.3
  • 12
    • 0037202584 scopus 로고    scopus 로고
    • Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering
    • Wang Q.P., Zhang D.H., Xue Z.Y., and Hao X.T., Violet luminescence emitted from ZnO films deposited on Si substrate by rf magnetron sputtering, Appl. Surf. Sci., 2002, 201: 123.
    • (2002) Appl. Surf. Sci. , vol.201 , pp. 123
    • Wang, Q.P.1    Zhang, D.H.2    Xue, Z.Y.3    Hao, X.T.4
  • 13
    • 0034188374 scopus 로고    scopus 로고
    • Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition
    • Jin B.J., Im S., and Lee S.Y., Violet and UV luminescence emitted from ZnO thin films grown on sapphire by pulsed laser deposition, Thin Solid Films, 2000, 366: 107.
    • (2000) Thin Solid Films , vol.366 , pp. 107
    • Jin, B.J.1    Im, S.2    Lee, S.Y.3
  • 14
    • 0037472262 scopus 로고    scopus 로고
    • 2 nanogranular films prepared by magnetron co-sputtering
    • 2 nanogranular films prepared by magnetron co-sputtering, Mater. Chem. Phys., 2002, 77: 841.
    • (2002) Mater. Chem. Phys. , vol.77 , pp. 841
    • Ding, R.Q.1    Wang, H.2
  • 17
    • 0032652792 scopus 로고    scopus 로고
    • Structural and optical properties of sputtered ZnO films
    • Bachari E.M., Baud G., Amor S.B., and Jacquer M., Structural and optical properties of sputtered ZnO films, Thin Solid Film, 1999, 348: 165.
    • (1999) Thin Solid Film , vol.348 , pp. 165
    • Bachari, E.M.1    Baud, G.2    Amor, S.B.3    Jacquer, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.