Direct observations of rapid diffusion of Cu in Au thin films using in situ x-ray diffraction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 978-987

  Elmer, J W ^a   Palmer, T A ^a   Specht, E D ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY DIFFUSION; GRAIN BOUNDARY DIFFUSION; INTERDIFFUSION COEFFICIENT; THIN FILM COATINGS;

ANNEALING; DIFFUSION; GRAIN BOUNDARIES; LATTICE CONSTANTS; THIN FILMS; X RAY DIFFRACTION;

COPPER;

EID: 33745485502     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2204926     Document Type: Article

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