Damage analysis in Al thin films fatigued at ultrahigh frequencies

Journal of Applied Physics

Volumn 99, Issue 11, 2006, Pages

  Eberl, Christoph ^a,b,g   Spolenak, Ralph ^c   Kraft, Oliver ^d,e   Kubat, Franz ^f   Ruile, Werner ^c   Arzt, Eduard ^a,b  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b UNIVERSITY OF STUTTGART   (Germany)

^c ETH ZURICH   (Switzerland)

^d KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^e UNIVERSITY OF KARLSRUHE   (Germany)

^f EPCOS AG   (Germany)

^g JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMAGE ANALYSIS; STRESS AMPLITUDES; ULTRAHIGH FREQUENCIES;

ACOUSTIC WAVE EFFECTS; ALUMINUM; FAILURE (MECHANICAL); FREQUENCIES; GRAIN BOUNDARIES; GRAIN GROWTH;

THIN FILMS;

EID: 33745316028     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2189970     Document Type: Article

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