-
1
-
-
33745259623
-
-
Okazaki Y. Precision positioning control apparatus and precision positioning control method, US Patent 5 801 939, September 1, 1998.
-
-
-
-
3
-
-
0033282440
-
Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems
-
Tsai K., and Yen J. Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems. Proc of Annual Conf Ind Electron Soc 1 (1999) 11-16
-
(1999)
Proc of Annual Conf Ind Electron Soc
, vol.1
, pp. 11-16
-
-
Tsai, K.1
Yen, J.2
-
4
-
-
0033724195
-
Robust and time-optimal control strategy for coarse/fine dual-stage manipulators
-
Kwon S., Chang W., and Youm Y. Robust and time-optimal control strategy for coarse/fine dual-stage manipulators. Proc IEEE Int Conference Robot Automat 4 April (2000) 4051-4056
-
(2000)
Proc IEEE Int Conference Robot Automat
, vol.4
, Issue.April
, pp. 4051-4056
-
-
Kwon, S.1
Chang, W.2
Youm, Y.3
-
5
-
-
0034877732
-
On the coarse/fine dual-stage manipulators with robust perturbation compensator
-
Kwon S., Chang W., and Youm Y. On the coarse/fine dual-stage manipulators with robust perturbation compensator. Proc IEEE Int Conf Robot Automat 1 May (2001) 121-126
-
(2001)
Proc IEEE Int Conf Robot Automat
, vol.1
, Issue.May
, pp. 121-126
-
-
Kwon, S.1
Chang, W.2
Youm, Y.3
-
6
-
-
0031097944
-
Developing a linear piezomotor with nanometer resolution and high stiffness
-
Zhang B., and Zhu Z. Developing a linear piezomotor with nanometer resolution and high stiffness. IEEE/ASME Trans Mech 2 1 (1997) 22-29
-
(1997)
IEEE/ASME Trans Mech
, vol.2
, Issue.1
, pp. 22-29
-
-
Zhang, B.1
Zhu, Z.2
-
8
-
-
3343005629
-
A systematic procedure for the design of piezoelectric inchworm precision positioners
-
Tenzer P., and Ben Mrad R. A systematic procedure for the design of piezoelectric inchworm precision positioners. IEEE/ASME Trans Mech 9 2 (2004) 427-435
-
(2004)
IEEE/ASME Trans Mech
, vol.9
, Issue.2
, pp. 427-435
-
-
Tenzer, P.1
Ben Mrad, R.2
-
10
-
-
33745281483
-
-
ANSYS, Version 8.0, Ansys Inc.
-
-
-
-
12
-
-
33745283733
-
-
Physik Instrumente GmbH & Co. KG: micropositioning, nanopositioning, nanoautomation solutions for cutting-edge technologies, Cat. 116, Karlsruhe, Germany, 2004.
-
-
-
-
13
-
-
33745247513
-
-
Maple, Version 9.01, Maplesoft.
-
-
-
-
14
-
-
57649237926
-
Design, modeling, and performance of a high force piezoelectric inchworm motor
-
Galante T., Frank J., Bernard J., Chen W., Lesieutre G., and Koopmann G. Design, modeling, and performance of a high force piezoelectric inchworm motor. SPIE Proc Smart Struct Integrat Syst 3329 (1998) 756-767
-
(1998)
SPIE Proc Smart Struct Integrat Syst
, vol.3329
, pp. 756-767
-
-
Galante, T.1
Frank, J.2
Bernard, J.3
Chen, W.4
Lesieutre, G.5
Koopmann, G.6
|