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Volumn 16, Issue 7, 2006, Pages 399-403

Analytical stiffness estimation for short flexures

Author keywords

Finite element analysis (FEA); Flexure; Inchworm; Stiffness

Indexed keywords

BENDING (FORMING); BENDING STRENGTH; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SHEAR STRESS; STIFFNESS;

EID: 33745288767     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechatronics.2006.03.002     Document Type: Article
Times cited : (10)

References (14)
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    • Tsai K., and Yen J. Servo system design of a high-resolution piezo-driven fine stage for step-and-repeat microlithography systems. Proc of Annual Conf Ind Electron Soc 1 (1999) 11-16
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    • Robust and time-optimal control strategy for coarse/fine dual-stage manipulators
    • Kwon S., Chang W., and Youm Y. Robust and time-optimal control strategy for coarse/fine dual-stage manipulators. Proc IEEE Int Conference Robot Automat 4 April (2000) 4051-4056
    • (2000) Proc IEEE Int Conference Robot Automat , vol.4 , Issue.April , pp. 4051-4056
    • Kwon, S.1    Chang, W.2    Youm, Y.3
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    • On the coarse/fine dual-stage manipulators with robust perturbation compensator
    • Kwon S., Chang W., and Youm Y. On the coarse/fine dual-stage manipulators with robust perturbation compensator. Proc IEEE Int Conf Robot Automat 1 May (2001) 121-126
    • (2001) Proc IEEE Int Conf Robot Automat , vol.1 , Issue.May , pp. 121-126
    • Kwon, S.1    Chang, W.2    Youm, Y.3
  • 6
    • 0031097944 scopus 로고    scopus 로고
    • Developing a linear piezomotor with nanometer resolution and high stiffness
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    • A systematic procedure for the design of piezoelectric inchworm precision positioners
    • Tenzer P., and Ben Mrad R. A systematic procedure for the design of piezoelectric inchworm precision positioners. IEEE/ASME Trans Mech 9 2 (2004) 427-435
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    • Tenzer, P.1    Ben Mrad, R.2
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    • ANSYS, Version 8.0, Ansys Inc.
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    • Physik Instrumente GmbH & Co. KG: micropositioning, nanopositioning, nanoautomation solutions for cutting-edge technologies, Cat. 116, Karlsruhe, Germany, 2004.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.