Bias sputter deposited Ni/Al2O3 cermet thin films for gas flow sensors

Thin Solid Films

Volumn 513, Issue 1-2, 2006, Pages 374-379

  Chiu, K F ^a   Dai, C C ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Bias sputtering; Cermet thin films; Flow sensors; Ni Al2O3

Indexed keywords

CERMETS; NICKEL COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

BIAS SPUTTERING; CERMET THIN FILMS; FLOW SENSORS; NI/AL2O3;

THIN FILMS;

EID: 33745280908     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.02.008     Document Type: Article

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