Positive temperature coefficient of resistivity in thin films of barium titanate

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 223-225

  Syrtsov, S R ^a   Shut, V N ^a   Kashevich, I F ^a   Sedlovsky, A S ^a   Watts, B E ^b  

^a ITA   (Belarus)

^b CNR   (Italy)

Author keywords

High frequency sputtering; Positive temperature coefficient of resistivity (PTCR); Thin films

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRIC RESISTANCE; HEATING EQUIPMENT; INTEGRATED CIRCUITS; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SPUTTERING; THERMISTORS; THIN FILMS;

POSITIVE TEMPERATURE COEFFICIENT (PTC);

BARIUM TITANATE;

EID: 0036557717     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00077-X     Document Type: Conference Paper

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