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Volumn 332, Issue 1-2, 1998, Pages 272-276
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Characterizing and modeling the apparent anomalous behavior of resistivity in Cr-Si-O thin films
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Author keywords
Cr Si O cermet; Effective medium theory; Reactive sputtering; Resitivity
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Indexed keywords
CERMETS;
ELECTRIC CONDUCTIVITY MEASUREMENT;
SPUTTER DEPOSITION;
THIN FILMS;
EFFECTIVE MEDIUM THEORY;
CERAMIC COATINGS;
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EID: 0032476280
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)01098-0 Document Type: Article |
Times cited : (18)
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References (16)
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