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Volumn 15, Issue 4-8, 2006, Pages 884-887

Effects of positively and negatively pulsed voltages on the microstructure of DLC films prepared by bipolar-type plasma based ion implantation

(6) Nakao, Setsuo a Choi, Junho a Kim, Jondoku a Miyagawa, Soji a Miyagawa, Yoshiko a Ikeyama, Masami a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Diamond like carbon; High resolution electron microscopy; Implantation; Microstructure

Indexed keywords

CRYSTAL STRUCTURE; DIAMOND CUTTING TOOLS; ELECTRIC POTENTIAL; GRAPHITE; HIGH RESOLUTION ELECTRON MICROSCOPY; ION IMPLANTATION; MICROSTRUCTURE; PLASMAS; RAMAN SCATTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

DIAMOND LIKE CARBON (DLC); ELASTIC RECOIL DETECTION; PULSED VOLTAGES; TURBOSTRATIC FORM;

CARBON;

EID: 33745272946 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.10.032 Document Type: Article

Times cited : (35)

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