Synergism between low-energy neutral particles and energetic ions in the pulsed glow discharge deposition of diamond-like carbon films

Applied Physics Letters

Volumn 85, Issue 5, 2004, Pages 718-720

  Afanasyev Charkin, I V ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGETIC IONS; ION FLUENCE; NEUTRAL PARTICLES; SYNERGISM;

DEPOSITION; DIAMOND LIKE CARBON FILMS; DISSOCIATION; ELECTRON EMISSION; ION BOMBARDMENT; IONS; SPUTTERING;

GLOW DISCHARGES;

EID: 4344618777     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1775876     Document Type: Article

References (9)

1. Z. Falkenstein, M. Hakovirta, and M. Nastasi, Thin Solid Films 381, 84 (2001).
2. S. Miyagawa, S. Nakao, M. Ikeyama, and Y. Miyagawa, Surf. Coat. Technol. 156, 1 (2002).
3. M. Hakovirta, D. H. Lee, X. M. He, and M. Nastasi, J. Vac. Sci. Technol. A 19, 782 (2001).
4. M. Tuszewski, I. Henins, M. Nastasi, W. K. Scarborough, K. C. Walter, and D. H. Lee, IEEE Trans. Plasma Sci. 26, 1653 (1998).
5. L. R. Doolittle, Nucl. Instrum. Methods Phys. Res. B 9, 344 (1985).
6. B. P. Wood, D. J. Rej, A. Anders, I. G. Brown, R. J. Faehl, S. M. Malik, and C. P. Munson, in Handbook of Plasma Immersion Ion Implantation and Deposition, edited by A. Anders (Wiley, New York, 2000), pp. 243-301.
7. M. A. Lieberman, in Handbook of Plasma Immersion Ion Implantation and Deposition, edited by A. Anders (Wiley, New York, 2000), p. 29.
8. R. Glang, in Handbook of Thin Film Technology edited by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970), pp. 1-21.
9. M. Nastasi, J. W. Mayer, and J. K. Hirvonen, Ion-Solid Interactions: Fundamentals and Application (Cambridge University Press, Cambridge, 1996), p. 180.