Electron-beam hardening of thin films of functionalized polynorbornene copolymer

Journal of Electronic Materials

Volumn 35, Issue 5, 2006, Pages 1112-1121

  Park, Seongho ^a   Krotine, Jeff ^b   Allen, Sue Ann Bidstrup ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

^b Promerus LLC   (United States)

Author keywords

Dielectric materials; Electron beam; Polymers

Indexed keywords

ELECTRON ENERGY; ELECTRON-BEAM HARDENING; POLYNORBORNENE COPOLYMER;

DIELECTRIC MATERIALS; ELECTRON BEAMS; OXIDATION; PHOTORESISTS; THERMODYNAMIC STABILITY; THERMOGRAVIMETRIC ANALYSIS; THIN FILMS;

COPOLYMERS;

EID: 33745012400     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02692574     Document Type: Conference Paper

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