Multilayer electron-beam curing of polymer dielectric for electrical interconnections

Electrochemical and Solid-State Letters

Volumn 3, Issue 5, 2000, Pages 228-231

  Manepalli, Rahul ^a   Farnsworth, Kimberly D ^a   Bidstrup Allen, Sue Ann ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; CURING; ELECTRON BEAMS; IRRADIATION; MICROELECTRONICS; MULTILAYERS; PERMITTIVITY; PLASTIC FILMS; SURFACE PROPERTIES; THERMAL EFFECTS;

ELECTRICAL INTERCONNECTION; ELECTRON BEAM CURING; POLYNORBORNENE;

POLYOLEFINS;

EID: 0034188629     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391009     Document Type: Article

References (8)

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3. W. R. Livesay, J. Vac. Sci. Technol., B, 11, (1993).
4. R. N. Manepalli, Ph.D. Dissertation, School of Chemical Engineering, Georgia Institute of Technology, Atlanta, GA (2000).
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7. A. Charlesby, Proc. K. Soc. London, Ser. A, 222, 542 (1954).
8. P. Chiniwalla, R. Manepalli, K. Farnsworth, M. Boatman, B. Dusch, S. A. Bidstrup-Allen, and P. A. Kohl, IKEE Trans. Adv. Packag., Submitted.