Directed growth of horizontal silicon nanowires by laser induced decomposition of silane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1248-1253

  Abed, H ^a   Charrier, A ^a   Dallaporta, H ^a   Safarov, V ^a   Jamgotchian, H ^a   Tonneau, D ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CATALYSIS; CHEMICAL VAPOR DEPOSITION; GOLD; LASER BEAM EFFECTS; SILANES;

GOLD PARTICLES; LASER INDUCED DECOMPOSITION; VAPOR-LIQUID-SOLID PROCESS;

NANOSTRUCTURED MATERIALS;

EID: 33744786797     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2194948     Document Type: Article

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