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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 4 A, 1999, Pages 2124-2130

Two-dimensional self-consistent simulation of a DC magnetron discharge

(4) Shidoji, Eiji a Ohtake, Hiroto a Nakano, Nobuhiko b Makabe, Toshiaki b

a ASAHI GLASS CO LTD (Japan)

b KEIO UNIVERSITY (Japan)

Author keywords

Discharge; Hybrid model; Magnetron sputtering; Plasma; Simulation

Indexed keywords

EID: 33744767768 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (3)

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