Tunable RF and analog circuits using on-chip MEMS passive components

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn 48, Issue , 2005, Pages 390-391

  Fedder, G K ^a   Mukherjee, T ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 28144436310     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. International Technology Roadmap for Semiconductors, public.itrs.net, 2003.
2. C. T.-C. Nguyen, "Vibrating RF MEMS for Next Generation Wireless Applications," CICC, pp. 257-64, Oct., 2004.
3. N. Hoivik et al, "RF MEMS Switches Using Copper-based CMOS Interconnect Manufacturing Technology," Sens., Act., and Microsys. Workshop, pp. 93-94, 2004.
4. G. K. Fedder et al, "Laminated High-Aspect-Ratio Microstructures In A Conventional CMOS Process," Sens. & Act. A, pp. 103-110, March, 1997.
5. D. Ramachandran et al, "MEMS-Enabled Reconfigurable VCO and RF Filter," RFIC Symp., pp. 251-254, June, 2004.
6. H. Lakdawala et al., "Micromachined High-Q Inductors in 0.l8μm Cu Interconnect Low-K CMOS," IEEE J. Solid-State Circuits, vol. 37, no. 3, pp. 394-403, Mar., 2004.
7. A. Oz et al., "CMOS-Compatible RF-MEMS Tunable Capacitors," RFIC Symp., pp. 611-614, June, 2003.
8. F. Chen et al., "CMOS-MEMS Resonant RF Mixer-Filters," IEEE MEMS, 2005.