Fabrication of three-dimensional structures by image processing

Sensors and Materials

Volumn 18, Issue 1, 2006, Pages 049-061

  Hanai, Kei ^a   Nakahara, Takashi ^a   Shimizu, Sayaka ^a   Matsumoto, Yoshinori ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

Binary optics; Gray scale lithography; Gray scale mask; Image processing; SU 8

Indexed keywords

EID: 33744726491     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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