Tapered LIGA HARMs

Journal of Micromechanics and Microengineering

Volumn 13, Issue 3, 2003, Pages 367-372

  Turner, Ryan ^a   Desta, Yohannes ^b   Kelly, Kevin ^a   Zhang, Jian ^a   Geiger, Emil ^a   Cortez, Steve ^a   Mancini, Derrick C ^c  

^a Louisiana State University   (United States)

^b LOUISIANA STATE UNIVERSITY   (United States)

^c ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CURING; ELECTROFORMING; EPOXY RESINS; MICROSTRUCTURE; NICKEL; PLASTIC MOLDS; POLYMETHYL METHACRYLATES; SUBSTRATES;

HIGH ASPECT RATIO MICROSTRUCTURE; MOLD INSERT; MOLD TOOL; STAINLESS STEEL SUBSTRATE;

X RAY LITHOGRAPHY;

EID: 0038015882     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/3/303     Document Type: Article

References (13)

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