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Volumn 34, Issue 1, 2006, Pages 464-469
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Design and simulation of a new decoupled micromachined gyroscope
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Author keywords
Finite element analysis; MEMS; Micromachined Gyroscope
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Indexed keywords
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EID: 33744523511
PISSN: 17426588
EISSN: 17426596
Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/34/1/076 Document Type: Article |
Times cited : (5)
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References (11)
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