Material Effects on Stress-Induced Defect Generation in Trenched Silicon-on-Insulator Structures

Journal of the Electrochemical Society

Volumn 148, Issue 11, 2001, Pages

  Nevin, W A ^a,c   Somasundram, K ^a   McCann, P ^a,c   Magee, S ^b   Paxton, A T ^b  

^a Analog Devices Inc UK   (United Kingdom)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^c ELECTROCHEMICAL SOCIETY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041655666     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1408636     Document Type: Article

References (16)

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