Automated layout and phase assignment techniques for dark field alternating PSM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3546, Issue , 1998, Pages 222-231

  Kahng, Andrew B ^a   Wang, Huijuan ^a   Zelikovsky, Alex ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; GRAPH THEORY; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; ITERATIVE METHODS; OPTIMIZATION;

PHASE SHIFTING MASKS (PSM);

MASKS;

EID: 0032297419     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.332830     Document Type: Conference Paper

References (13)