Thermal stability of undoped strained Si channel SiGe heterostructures

Applied Physics Letters

Volumn 68, Issue 14, 1996, Pages 1975-1977

  Klauk, H ^a   Jackson, T N ^a   Nelson, S F ^b   Chu, J O ^c  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Health Services and Department of Biology   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000826849     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115644     Document Type: Article

References (13)

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