Development of superimposed PBIID equipment for uniform and superthick DLC coatings

New Diamond and Frontier Carbon Technology

Volumn 16, Issue 1, 2006, Pages 49-54

  Nishimura, Yoshimi ^a   Shinohara, Masaru ^a   Sato, Yoshinobu ^a  

^a Kurita Seisakusho Co Ltd   (Japan)

Author keywords

Ion implantation; Plasma based ion implantation and deposition (PBIID); Superimpose; Thick DLC; Uniform coating

Indexed keywords

ADHESION; DEPOSITION; DIAMOND LIKE CARBON FILMS; HYDROCARBONS; INTERFACES (MATERIALS); ION IMPLANTATION; ORGANOMETALLICS; PLASMAS;

GAS PRESSURE; PLASMA BASED ION IMPLANTATION AND DEPOSITION (PBIID); SUPERIMPOSE; THICK DLC; UNIFORM COATING;

COATINGS;

EID: 33646805781     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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