Optical properties of P ion implanted ZnO

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6122, Issue , 2006, Pages

  Pong, Bao Jen ^a   Chou, Bo Wei ^a   Pan, Ching Jen ^a   Tsao, Fu Chun ^a   Chi, Gou Chung ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Antisite oxygen; DAP transition; Interstitial oxygen; Interstitial zinc; Microstrain; Phosphorus ion implanted; ZnO

Indexed keywords

ANNEALING; ION IMPLANTATION; LIGHT EMISSION; OPTICAL PROPERTIES; OXYGEN; PHOSPHORUS; TEMPERATURE DISTRIBUTION;

ANTISITE OXYGEN; DONOR ACCEPTOR PAIR (DAP) TRANSITION; GREEN EMISSIONS; INTERSTITIAL OXYGEN; INTERSTITIAL ZINC; MICROSTRAIN; PHOSPHORUS ION IMPLANTED; RED EMISSION;

ZINC OXIDE;

EID: 33646782259     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.644045     Document Type: Conference Paper

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