SCOPUS 정보 검색 플랫폼

Volumn 88, Issue 19, 2006, Pages

Interfacial reactions in a HfO2/TiN/poly-Si gate stack

c IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE DETECTION; ELECTRON ENERGY LOSS SPECTROSCOPY; REACTION KINETICS; SILICON; SURFACE CHEMISTRY; TITANIUM NITRIDE;

CORE EDGES; GATE STACK; INTERFACIAL REACTIONS; METAL GATES;

HAFNIUM ALLOYS;

EID: 33646762820 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2201891 Document Type: Article

Times cited : (21)

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