Crystallographic analysis of polysilicon films formed on foreign substrates by aluminium induced crystallisation and epitaxy

Thin Solid Films

Volumn 511-512, Issue , 2006, Pages 15-20

  Pihan, E ^a   Focsa, A ^a   Slaoui, A ^a   Maurice, C ^b  

^a Phase CNRS   (France)

^b LCG   (France)

Author keywords

Aluminium; Ceramics; Crystallisation; Electron backscattering diffraction; Epitaxy; Silicon

Indexed keywords

ALUMINA; CRYSTALLIZATION; EPITAXIAL GROWTH; GRAIN BOUNDARIES; POLYSILICON; SILICON; THIN FILMS;

ALUMINIUM-INDUCED-CRYSTALLISATION (AIC); ELECTRON BACKSCATTERING DIFFRACTION; POLYSILICON FILMS; SUBGRAIN-STRUCTURES;

POLYMERS;

EID: 33646589629     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.147     Document Type: Article

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