Polycrystalline silicon films on ceramic substrates by aluminium-induced crystallisation process

Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion

Volumn B, Issue , 2003, Pages 1182-1185

  Pihan, E ^a   Slaoui, A ^a   Focsa, A ^a   Roca i Cabarrocas, P ^b  

^a CNRS   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINIUM-INDUCED CRYSTALLIZATION (AIC); CROSS SECTION; METAL-INDUCED CRYSTALLIZATION (MIC); MULLITE;

CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; MELTING; RAMAN SPECTROSCOPY; SILICA; SOLAR CELLS;

THIN FILMS;

EID: 6344221800     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. T. Ishihara, "Zone-melting recrystallization of Si films for solar cells", in: Growth, Characterization and Electronic Application of Si-based Thin Films 2002, Research Signpost, ed. R.B. Bergmann, (2002) p. 79.
2. J.R. Kôhler, "Laser crystallization of Si and Si-Ge films", ibid, p.39.
3. H.A. Atwater, CM. Chen "Solid Phase crystallization of Si and Ge", ibid, p.55.
4. O. Nast, A. Hartmann, "Influence of interface and Al structure on layer exchange during aluminium-induced crystallization of amorphous silicon", Journal of Applied Physics 88 (2), 716 (2000).
5. P.I. Widenborg and A. G. Aberle, "Surface morphology of poly-Si films made by aluminium-induced crystallisation on glass substrates", Journal of Crystal Growth 242 (3-4), 270 (2002).
6. D.H. Neuhaus, R. Bardos, L. Feitknecht, T. Puzzer, M.J. Keevers, and A.G. Aberle, "Minority carrier properties of single and polycrystalline silicon films formed by aluminium-induced crystallisation" Proceedings of the 28th Photovoltaic Specialists Conference, (IEEE, Anchorage, 2000), p.65.
7. A. Slaoui, E. Pihan, and M. Rusu, "Formation of polycrystalline silicon on foreign substrates by combination of CVD and aluminium induced crystallization techniques", 17th Euroepan Photovoltaïc Solar Energy Conference and Exhibition,(WIP, Munich, 2001), p.1462.
8. N.-P. Harder, T. Puzzer, P. Widenborg, S. Oelting, J. A. Xia, and A.G. Aberle, "Impact of seeding layer on silicon epitaxy on glass by ion assisted deposition", 17th European Photovoltaic Solar Energy Conference and Exhibition,(WIP, Munich, 2001), p.1355.
9. th Photovoltaic Specialists Conference, (IEEE, Anchorage, 2000), p.128.